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Edge preserving filtering of micro-structured surfaces
ZHANG Xiangchao 1 * #,Xu Min 2
1.Shanghai Ultra-Precision Manufacturing Engineering, Center, Fudan Universtiy, ShangHai 200438
2.Shanghai Ultra-Precision Manufacturing Engineering, Center, Fudan Universtiy, Shanghai, 200438
*Correspondence author
#Submitted by
Subject:
Funding: Research Fund for the Doctoral Program of Higher Education (No.No. 20120071120018), National Natural Science Foundation of China (No.No. 51205064), Shanghai Natural Science Foundation (No.No. 12ZR1441100)
Opened online: 4 June 2013
Accepted by: none
Citation: ZHANG Xiangchao,Xu Min.Edge preserving filtering of micro-structured surfaces[OL]. [ 4 June 2013] http://en.paper.edu.cn/en_releasepaper/content/4545572
 
 
Micro optical elements are more and more widely used in precision engineering. Characterisation of the surface topography of these surfaces is very difficult due to the existence of sharp edges and complex features. The Gaussian filter will ruin the sharp features of structured surfaces. In this paper a Gaussian bilateral filter is developed. It uses two kernel functions. When implementing filtering, the weights of the neighbouring data points are assigned not only based on the spatial closeness, but also according to the signal similarity. Thus at the regions of sharp edges, large weighting values are assigned only to the data points that are similar to the current data values, and the sharp features can be preserved successfully. Numerical validations are presented to compare the behaviours of conventional Gaussian filter and the bilateral filter. The results demonstrated that the developed Gaussian bilateral filter shows remarkable superiority on filtering non-smooth micro-structured surfaces.
Keywords:surface metrology; micro-structured surface; edge-preserving filtering; bilateral filter
 
 
 

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