Fabrication and Detection of Carbon Nanotube Gas Sensor Microelectrodes

RAN Xiangtao; XU Hongmei; WANG Zuobin; WENG Zhankun; SONG Zhengxun; MI Weixun

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Fabrication and Detection of Carbon Nanotube Gas Sensor Microelectrodes

RAN Xiangtao 1,XU Hongmei 2 *,WANG Zuobin 1,WENG Zhankun 2,SONG Zhengxun 1,MI Weixun 2

1.College of Electronic Information Engineering, Changchun University of Science and Technology, Changchun 130022

2. Int. Research Centre for Nano Handling & Manufacturing of China, Changchun 130022

*Correspondence author

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Funding: 973 Program （No.No.2012CB326406), EU FP7）, ECNANOMAN No.269219), Int. S&T Cooperation Program of China （No.No.2012DFA11070), NSFC）

Opened online:31 December 2013

Accepted by: none

Citation: RAN Xiangtao,XU Hongmei,WANG Zuobin.Fabrication and Detection of Carbon Nanotube Gas Sensor Microelectrodes[OL]. [31 December 2013] http://en.paper.edu.cn/en_releasepaper/content/4575209

With the increasing needs for high-performance gas sensors in industrial production, environmental monitoring and home safety, the research on gas sensors is becoming more and more important. In this paper, the electric field intensity distribution simulation process of interdigital microelectrodes (IMEs) is discussed in detail to get the proper electrode structural parameters. The IMEs on the ITO surface with a minimum gap of about 4μm is achieved by lithography, which provides a reliable, low-cost manufacturing method. Sensitive components are made of the multi-walled carbon nanotubes modified materials. The electrochemical properties of the components are analyzed and characterized. The gas-sensing property of the sensor is respectively detected under both conditions of light presence and absence. The experiment result shows that the performance of the nano-modified sensor under the condition of light presence is obviously improved.

Keywords:nano manufacturing theory and application; lithography; interdigital microelectrodes (IMEs); carbon nanotubes (CNTs); gas sensor

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