Physics-based Modeling for Si CMOS On-Chip Spiral Inductors using Characteristic functions

Wu Zhongjie; Yu Tian; Yufeng Zhu; Nan Jiang; Yusong Chi; Huang Fengyi

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Physics-based Modeling for Si CMOS On-Chip Spiral Inductors using Characteristic functions

Wu Zhongjie,Yu Tian,Yufeng Zhu,Nan Jiang,Yusong Chi,Huang Fengyi *

Institute of RF&OE-ICs，Southeast University

*Correspondence author

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Funding: 国家自然科学基金,教育部博士点基金,国家863项目（No.60771022，20040286022，2007AA01Z2b1）

Opened online:14 April 2008

Accepted by: none

Citation: Wu Zhongjie,Yu Tian,Yufeng Zhu.Physics-based Modeling for Si CMOS On-Chip Spiral Inductors using Characteristic functions[OL]. [14 April 2008] http://en.paper.edu.cn/en_releasepaper/content/20462

We present an extended review on the modeling of silicon CMOS on-chip spiral inductors based on S-parameter measurement. A series of equivalent circuits including different number of n-π structure with both symmetric and asymmetric geometries have been studied. The parameter extraction is carried out using a set of characteristic functions derived from the equivalent circuit without iterative optimization. As verified by a series of inductors fabricated with a 0.18 μm CMOS process, a good agreement between the measured and simulated data over a wide frequency range has been obtained. The characteristic-function approach can alleviate the potential problem of multiple solutions pertaining to conventional numerical method based on iteration optimization.

Keywords:Inductor, modeling, equivalent circuit, parameter extraction

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