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Sponsored by the Center for Science and Technology Development of the Ministry of Education
Supervised by Ministry of Education of the People's Republic of China
Spatial coherence is of increasing interest for many laser applications such as lithography, material processing and beam coherence combination etc. The method to determine the parameters of spatial coherence by using Wigner distribution of laser beam is discussed carefully. The measurement of Wigner distribution and some experimental results was discussed in detail.
Keywords:Spatial coherence;Beam parameters measurement;Wigner distribution