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Sponsored by the Center for Science and Technology Development of the Ministry of Education
Supervised by Ministry of Education of the People's Republic of China
C-axis-aligned InN nanocolumns arrays were vertically grown, on 3μm GaN substrates with InGaN buffer layers by radio-frequency molecular beam epitaxy. The density of the nanocolumns could be controlled by adjusting the ratio of In and N. X-ray diffraction, transmission electron microscopy, and field-emission scanning electron microscope were used to study the structural properties of the nanocolumns. And the growth mechanism was studied.