The aberration theory of a combined electron focusing-deflection system with a rotating deflection field following the rotation of the electrons

Yan Ren; Tiantong Tang; Yongfeng Kang; Xiaoli Guo

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The aberration theory of a combined electron focusing-deflection system with a rotating deflection field following the rotation of the electrons

Yan Ren 1 * #,Tiantong Tang 1,Yongfeng Kang 2,Xiaoli Guo 2

1.Department of electronics Science and Technology, School of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an

2.Department of electronics Science and Technology-School of Electronics and Information Engineering- Xi’an Jiaotong University, Xi’an

*Correspondence author

#Submitted by

Subject:

Funding: 教育部博士点基金（No.20020698020）

Opened online:19 December 2005

Accepted by: none

Citation: Yan Ren,Tiantong Tang,Yongfeng Kang.The aberration theory of a combined electron focusing-deflection system with a rotating deflection field following the rotation of the electrons[OL]. [19 December 2005] http://en.paper.edu.cn/en_releasepaper/content/4475

A new type of combined electron focusing-deflection system is proposed, in which the orientation of the deflection field is rotated following the rotation of the electrons caused by the magnetic lens field. The deflection direction rotated electrical deflectors can be constructed by using TWE (tube wall electrode) systems. Formulae are derived for the first-order optical properties, third order geometrical aberrations and first-order chromatic aberrations of this system. A program was written in FORTRAN for numerical computation. An example is given; the computation results show that compared to the conventional systems, the proposed new system has lower deflection aberration coefficients.

Keywords:combined focusing-deflection systems, aberration, tube wall electrode systems

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