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Diamond-like carbon deposition using microwave plasma chemical vapor deposition |
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Lai Xiuqiong * #,Chen Junfang ,Silie Fu,Wei Li,Maoping Zhang,Lei Shi, Chunlin Yang
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South China Normal University
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*Correspondence author |
#Submitted by |
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Subject: |
Funding:
教育部博士点基金(No.2004057408) |
Opened online: 7 November 2006 |
Accepted by:
none |
Citation: Lai Xiuqiong ,Chen Junfang ,Silie Fu.Diamond-like carbon deposition using microwave plasma chemical vapor deposition[OL]. [ 7 November 2006] http://en.paper.edu.cn/en_releasepaper/content/9343 |
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