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Advances of non-oxide materials prepared from polysilazane
Wang Huatao #,Xie Zhipeng *
State Key Lab of New Ceramics and Fine Processing, Department of Materials Science and Engineering, Tsinghua University
*Correspondence author
#Submitted by
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Funding: 教育部高等学校博士学科点专项科研基金,国家自然科学基金（No.20050003004,50540420104）
Opened online:22 January 2009
Accepted by: none
Citation: Wang Huatao,Xie Zhipeng.Advances of non-oxide materials prepared from polysilazane[OL]. [22 January 2009] http://en.paper.edu.cn/en_releasepaper/content/28181
 
 
This paper reviews the advances of non-oxide materials prepared from polysilazane. The composition, structure and properties of amorphous SiCN derived from polysilazane are introduced. The fabrication of dense bulk ceramics is followed by the discussion of various processing techniques. This review highlights the fabrication of MEMS by polysilazane derived ceramics, which are recently developed and has potential application in high temperature condition. And a novel processing of low-dimension nano-Si3N4 from polysilazane is discussed in the last section.
Keywords:polysilazane, amorphous SiCN, low-dimensional nanomaterials
 
 
 

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