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Multi-step spin coating method to improve ferroelectric P(VDF-TrFE) thin film quality
Zhu Guodong * #
Department of Materials Science, Fudan University
*Correspondence author
#Submitted by
Subject:
Funding: Specialized Research Fund for the Doctoral Program of Higher Education of China （No.200802461088）, the open fund of the State Key Laboratory of ASIC & System （No.10KF004）, National Natural Science Foundation of China （No.10804020, 60976074, and 61076068）
Opened online:12 May 2011
Accepted by: none
Citation: Zhu Guodong.Multi-step spin coating method to improve ferroelectric P(VDF-TrFE) thin film quality[OL]. [12 May 2011] http://en.paper.edu.cn/en_releasepaper/content/4425372
 
 
In the application of nonvolatile memory devices, ferroelectric polymer films were required to be scaled down to nanometer scale to decrease operation voltage and then power consumption. However, traditional one-step spin coating method was hard to meet this requirement because of poor film quality. Here we developed a multi-step coating method in order to improve film quality with smaller surface roughness and less surface defects. Detailed experimental observations were included in this paper.
Keywords:Ferroelectric Polymer; Spin Coating; Film Quality; Memory Device
 
 
 

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