Home > Papers

 
 
The trigger mechanism and experiment of a three-dimensional quartz tuning fork probe
HUANG Qiangxian 1 *,SHI Kedi 2 #,YU Huijuan 2,HAN Bin 2
1.School of Instrument and Opto-electronic Engineering, Hefei University of Technology, HeFei 230009
2.School of Instrument and Opto-electronic Engineering, Hefei University of Technology, 230009
*Correspondence author
#Submitted by
Subject:
Funding: Specialized Research Fund for the Doctoral Program of Higher Education （No.No.20100111110011）, National Natural Science Foundation of China （No.No. 51175141）
Opened online:28 June 2013
Accepted by: none
Citation: HUANG Qiangxian,SHI Kedi,YU Huijuan.The trigger mechanism and experiment of a three-dimensional quartz tuning fork probe[OL]. [28 June 2013] http://en.paper.edu.cn/en_releasepaper/content/4548836
 
 
In order to fulfill true three dimensional (3D) nano-measurement with sub-nano resolution and very low touch force by micro/nano coordinate measuring machine (Micro/nano CMM), a new 3D resonant trigger probe based on quartz tuning fork is proposed. In this probe, a quartz tuning fork together with a microball tip vibrates at its resonant frequency, and it is used as a sensing element of the trigger probe. The resonant vibrating parameters of the quartz tuning fork are highly sensitive to external 3D micro-forces. The distinguished feature of the probe is that it contacts with the sample surface in tapping-mode (TM) in Z direction while works in friction-mode (FM) in X and Y directions. The dynamic contact mechanism of the probe is analyzed according to interface mechanical theory, and mechanical models of the interactions between the microsphere tip and sample surface in X(Y) and Z directions are constructed respectively. According to the established motion equation of mechanical models, several mesoscopic interface forces which influences the probe are analyzed, and the corresponding mathematical simulations are given. By experiment, the probe has sub-nano resolutions in three dimensional directions, and repeatability of about 37 nm in X direction, 70.6 nm in Y direction and 41 nm in Z direction. The theoretical analysis and experimental results certified that this 3D resonant trigger probe can be used as a trigger probe for micro/nano CMM.
Keywords:precision measurement technology and instruments; three dimensional trigger probe; quartz tuning fork; interface mechanics; resonant vibration; micro/nano CMM
 
 
 

For this paper
  • ● PDF (0B)
  • ● Revision 0 　　
  • ● Print this paper
  • ● Recommend this paper to a friend
  • ● Add to my favorite list

    Saved Papers

    Please enter a name for this paper to be shown in your personalized Saved Papers list

Tags
Add yours

Related Papers

Statistics
PDF Downloaded 192
Bookmarked 0
Recommend 5
Comments Array
Submit your papers