| A low-stress, elastic and improved hardness hydrogenated amorphous carbon film |
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Wang Qi 1 * #,He Deyan 2,Zhang Junyan 3
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1.School of Physics, Lanzhou University, LanZhou 730000
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2.School of Physics, Lanzhou University, Lanzhou 730000
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3.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Lanzhou 730000
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| *Correspondence author |
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| Funding:
The project was financially supported by the Ph.D. Programs Foundation of Ministry of Education of China （No.No. 20100211120017） |
| Opened online: 2 August 2013 |
| Accepted by:
none |
| Citation: Wang Qi,He Deyan,Zhang Junyan.A low-stress, elastic and improved hardness hydrogenated amorphous carbon film[OL]. [ 2 August 2013] http://en.paper.edu.cn/en_releasepaper/content/4553353 |
