Design, modeling and control of a novel servo stage for direct write manufacturing systems |
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ZHANG Zhen 1,WANG Peng 2,YAN Peng 3
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1.Department of Mechanical Engineering, Tsinghua University, Beijing 100084;Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipment and Control 100084
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2.Department of Mechanical Engineering, Tsinghua University, Beijing 100084
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3.School of Automation Science and Electrical Engineering, Beihang University, Beijing 100191
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*Correspondence author |
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Subject: |
Funding:
高等学校博士学科点专项科研基金资助课题 (No.20100002120043) |
Opened online:15 January 2014 |
Accepted by:
none |
Citation: ZHANG Zhen,WANG Peng,YAN Peng.Design, modeling and control of a novel servo stage for direct write manufacturing systems[OL]. [15 January 2014] http://en.paper.edu.cn/en_releasepaper/content/4578093 |