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Design, modeling and control of a novel servo stage for direct write manufacturing systems
ZHANG Zhen 1,WANG Peng 2,YAN Peng 3
1.Department of Mechanical Engineering, Tsinghua University, Beijing 100084;Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipment and Control 100084
2.Department of Mechanical Engineering, Tsinghua University, Beijing 100084
3.School of Automation Science and Electrical Engineering, Beihang University, Beijing 100191
*Correspondence author
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Funding: 高等学校博士学科点专项科研基金资助课题 (No.20100002120043)
Opened online:15 January 2014
Accepted by: none
Citation: ZHANG Zhen,WANG Peng,YAN Peng.Design, modeling and control of a novel servo stage for direct write manufacturing systems[OL]. [15 January 2014] http://en.paper.edu.cn/en_releasepaper/content/4578093
 
 
In this paper we present the design, modeling and control of a novel parallel kinematics XY servo stage for the development of direct writing-based manufacturing systems. Compared with the existing systems, that introducing a high-precision servo stage enables the fabricated devices with more complex topological structure. The advantages of the proposed design lie in low inertia, uniform kinematic conditioning, and dynamically matched axes. Moreover the design of the stage makes the overall actuation system well suited for high-speed contouring in an XY plane.The features of the rolling interface of the linear guideways are studied and experimentally verified. The features of the rolling interface of the linear guideway are studied and experimental verification. kinematics, dynamics, and mechanical design of the system are described. The experimental results demonstrate that the proposed design offers a good performance for high-speed contouring. For the varied pore size of the mask, we propose a time-varying internal model-based control design to tackle the problem of reference trajectories with varying speeds. Contour tracking experiments are conducted to evaluate the system performance.
Keywords:Mechatronics; Direct writing technology; Time-varying internal model-based control
 
 
 

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