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Structure and tribological properties of Ti-containing amorphous carbon coatings prepared by cathode arc-enhanced middle-frequency magnetron sputtering
Yang bing *,Huang Zhihong,Fan Xiangjun,Fu Dejun
Wuhan University
*Correspondence author
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Funding: 博士点（No.20020486016）
Opened online: 6 March 2006
Accepted by: none
Citation: Yang bing,Huang Zhihong,Fan Xiangjun.Structure and tribological properties of Ti-containing amorphous carbon coatings prepared by cathode arc-enhanced middle-frequency magnetron sputtering[OL]. [ 6 March 2006] http://en.paper.edu.cn/en_releasepaper/content/5523
 
 
Ti-containing amorphous carbon (Ti-aC) coatings were deposited on cemented carbide and Si substrates by cathode arc-enhanced closed field middle-frequency unbalanced magnetron sputtering. The coatings were studied by using atomic force microscopy, Raman scattering, nanoindentation, and pin-on-disk testing. The measurements showed that the hardness of the coatings increased from 12 GPa at a Ti content of 1 at.% to 27 GPa at 31 at.%. The coatings exhibited different friction behavior when facing different mating materials and changed with increasing Ti content. The coating with 4 at.% Ti exhibits excellent tribological performance with a low friction coefficient of 0.07 when facing the cemented carbide.
Keywords:Arc-enhanced magnetron sputtering; Diamond-like carbon; Hardness; Tribological performance
 
 
 

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