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| his paper presents a parallel dynamic passive valveless micropump, which consists of three layers—valve, diaphragm and electromagnetic coil. The valve is wetly etched in a silicon wafer, the diaphragm is a PDMS (polydimethyl siloxane) film spun on a silicon wafer with embedded permanent magnet posts, and the coil is electroplated on a silicon substrate. Under the actuation of the magnetic field of the coil, the flexible diaphragm can be displaced upwards and downwards. After analyzing magnetic and mechanical characteristic of the flexible membrane and direction-dependence of the nozzle, this paper designed a micropump. And the relative length (L/d) of the micropump’s nozzle is 4.An 7×7 array of permanent magnetic posts is embedded in the PDMS film. The two diaphragms work in an anti-step mode, which can relieve the liquid shock and increase the discharge of the micropump. ANSYS○R and Matlab○R are adopted to analyze the actuation effect of the coil and the flow characteristic of the mi |
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| Keywords:micropump, valveless pump, permanent magnet, PDMS |
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