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A method for a simpler and more convenient replica molding of high-performance PDMS chips
ZHANG Jinling 1,YANG Pengyuan 2,SUI Guodong 3 * #
1.Department of Environmental Science & Engineering, Fudan University, Shanghai 200433
2.Institute of Biomedical Science, Fudan University, Shanghai, 200433
3.Department of Environmental Science & Engineering, Fudan University, Shanghai, 200433
*Correspondence author
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Funding: NSFC（No.20975025）, Specialized Research Fund for the Doctoral Program of Higher Education（No.SRFDP 20090071110006）
Opened online:23 January 2013
Accepted by: none
Citation: ZHANG Jinling,YANG Pengyuan,SUI Guodong.A method for a simpler and more convenient replica molding of high-performance PDMS chips[OL]. [23 January 2013] http://en.paper.edu.cn/en_releasepaper/content/4513890
 
 
We present a method of an improvement for the standard soft lithography fabrication process to generate highly reduplicate microfabricated patterns. This method improves the release of poly (dimethylsiloxane) (PDMS) devices from replica molds with high-density microstructures. During fabrication, only one extra step was added to prepare a single-spin coating of a thin layer of PDMS, compared with traditional microfabrication technique. It was validated with silicon wafers containing arrays of 50 μm deep SU8 microwells with various densities (a maximum density of 50000/cm2).
Keywords:microfluidics; PDMS; soft lithography
 
 
 

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