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SPR Phase Detection for Measuring the Thickness of Bimetallic Layers' Film
Liu Chao,Yue Chong,Qin Zirui,Liu Qinggang *
State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China
*Correspondence author
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Funding: Key Program of Natural Science Foundation of Tianjin （No.14JCZDJC31100）, National Natural Science Foundation of China （No.51575387）
Opened online:19 January 2018
Accepted by: none
Citation: Liu Chao,Yue Chong,Qin Zirui.SPR Phase Detection for Measuring the Thickness of Bimetallic Layers' Film[OL]. [19 January 2018] http://en.paper.edu.cn/en_releasepaper/content/4743064
 
 
In this paper, the phase detection method is demonstrated to determine the films thicknesses of bimetallic layers by Surface Plasmas Resonance (SPR) prism coupler. It was proposed and developed by matching the experimental results to the theoretical curves of the phase difference with different angles of incidence. Theoretical analysis and experimental results indicate that the method proposed is stable and reliable, and feasible to be used to determine the film thickness of bimetallic layers directly with nanometer order resolution.
Keywords:Phase measurement; Metal optics; Thin films; Multilayers; Surface plasmons
 
 
 

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