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Sponsored by the Center for Science and Technology Development of the Ministry of Education
Supervised by Ministry of Education of the People's Republic of China
Increasing attention has been paid to the production and investigation of the Zinc-Stannate films, which are found sensitive to NOx gases and humidity. Using sol-gel technical, Zn2SnO4 thin films were successfully deposited on alumina and silicon substrates. Treated under different temperatures and observed with SEM, it can be seen that according to increased temperatures, the structures of thin films changed from amorphy to hexagonal crystal. Furthermore, the gas sensitive characteristics of Zinc Stannate thin films were also investigated.
Keywords:Zinc-Stannate; Thin film; Sol-gel; Gas sensitivity