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SPR phase detection for measuring the thickness of different thin metal films
Liu Chao,Yue Chong,Qin Zirui,Liu Qinggang *
State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China
*Correspondence author
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Funding: Key Program of Natural Science Foundation of Tianjin （No.14JCZDJC31100）, National Natural Science Foundation of China （No.51575387）
Opened online:25 January 2018
Accepted by: none
Citation: Liu Chao,Yue Chong,Qin Zirui.SPR phase detection for measuring the thickness of different thin metal films[OL]. [25 January 2018] http://en.paper.edu.cn/en_releasepaper/content/4743065
 
 
In this paper, a novel method to determine the thickness of different thin metal film is put forward which uses Surface Plasmon Resonance (SPR) phase detection method. The relations between the metal film thickness and the phases of the transverse magnetic (TM) and transverse electric (TE) polarization of the reflected light are shown in the simulation results. By recording the interference patterns which contain the information of the phase differences in the experiments, the values of thickness are calculated. Both of the theoretical analysis and experimental results indicate that the approach presented is feasible and reliable. Thus, it is possible to use the method of phase detection to determine the thickness of different thin metal films in SPR prism couplers directly with nanometer resolution.
Keywords:Phase measurement; Metal optics; Thin films; Surface plasmons
 
 
 

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